A Slab Waveguide Sensor for a Fully Integrated IR-Absorption Sensor System - Theoretical and Experimental Verification
Sprache des Titels:
Englisch
Original Buchtitel:
Proceedings Transducers 2009
Original Kurzfassung:
Integrated IR-absorption sensors are attractive for
various industrial applications, e.g., online condition
monitoring of liquids such as lubrication oil. In this
contribution, we present theoretical and experimental
results showing that an appropriately designed waveguide
represents a suitable absorption sensor element. To this
end, we utilize the evanescent field of a single-mode
waveguide with high sensitivity in the mid-infrared region,
which is particularly interesting for a number of
applications. Grating couplers are utilized for coupling
broadband IR-radiation in and out of the waveguide, where
the coupling angle can be used for spectral separation. This
concept enables to integrate all components of an
absorption sensor into a single sensor element.
Forschungs-