Density sensor for application in a gas phase polymerization process based on quartz crystal resonators
Sprache des Vortragstitels:
Englisch
Original Tagungtitel:
Mikroelektronik
Sprache des Tagungstitel:
Englisch
Original Kurzfassung:
We investigate a gas density sensor based on quartz crystal
resonators for high pressure (2.5 × 106 Pa) and high
temperature (340 K) application. Flexural resonators, e.g.
tuning fork resonators, have successfully been used for density
measurement of pure gases. In our contribution, they
are evaluated with respect to their sensitivity to gas density
for the target application in a polymerization reactor,
involving high ambient pressures and temperatures. Moreover,
a density sensor for density measurements in unknown
gases and gas mixtures, based on two tuning forks, is presented.
It is shown that an pressure induced frequency shift
occurs which has to be considered at higher pressures for
accurate density measurement.
Forschungs-