Fully Screen-Printed High Temperature Stable Thermocouple for Measuring Fluid Temperatures Inside Microchannels
Sprache des Vortragstitels:
Microelectronic Systems Symposium
Sprache des Tagungstitel:
This work presents a way to measure in situ the temperature of fluids in microchannels. A polymer based silver/carbon black thermocouple is realized on glass substrate by screen printing only. It is then utilized to measure the temperature of oil in a 3D-printed microchannel. Due to the usage of high-temperature stable polymer pastes, this method is suitable for measuring temperatures of up to 200°C. Moreover, the manufacturing as well as the measuring process is fast and low cost and does not require any sophisticated setup.
The output voltage of the thermocouples at 170°C is slightly over 1 mV. Four thermocouples were then used to monitor the cooling process of heated fluid inside a microchannel: To do so, pre-heated oil is pumped into a channel. The first thermocouple is placed directly at the fluid inlet. The remaining three thermocouples are placed equidistantly along the channel. The cooling process of the oil is monitored by measuring the temperature of the oil at the four thermocouples.