Characterizing the geometrical tolerances of optimized vertical-cavity thermal emitter stack configurations for the mid-infrared via Monte Carlo testing
Sprache des Vortragstitels:
SPIE Microtechnologies 2017
Sprache des Tagungstitel:
We evaluate a recently devised design of vertical-cavity enhanced resonant thermal emitter (VERTE) regarding stability to fabrication tolerances of PVD layer deposition techniques. Such an emitter achieves narrowband and coherent thermal emission and is composed of an multilayer stack of dielectric layers (silicon and silica) on top of a reflective metal (silver) structure. The silica layer above the metal acts as a vertical cavity enhancing the electromagnetic field between the reflective metal and the dielectric stack forming a Bragg mirror (1-D photonic crystal). In our previous work, we identified several suitable five-layer-stack configurations, which considered several features and limitations of a real-world device, such as temperature dependence of the materials, fabrication constraints or unwanted emission modes. However, the emission characteristics are very sensitive to the geometrical and optical properties of the material. In order to examine this behaviour, a Monte-Carlo algorithm was used to apply a Gauss-distributed error in depth (relative the unperturbed layer thickness) for every individual layer. The robustness of the emission properties against fabrication errors were evaluated and analyzed by significant statistical quantities.