Low-Cost Fabrication of Electrowetting-on-Dielectric Structures for Microelectronics and Lab-on-a-Chip Applications
Sprache des Vortragstitels:
Deutsch
Original Tagungtitel:
Microelectronic Systems Symposium 2016
Sprache des Tagungstitel:
Englisch
Original Kurzfassung:
The present work considers different methods for the fabrication of Electrowetting-on-Dielectric (EWOD) structures for microelectronics and Lab-on-a-chip applications. The electrowetting effect allows droplet movement by manipulating the surface tension equilibrium between the governing fluid interfaces in an EWOD system. A voltage induced imbalance of the contact angle (CA) at the triple contact line leads to a pressure difference inside the droplet, driving it into the direction of the smaller CA.
The three presented low-cost EWOD stacks consist of a suitable substrate, actuation electrodes and dielectric and hydrophobic layers. Cu electrodes on PCB boards, silver screen printed electrodes on microscope slides and poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PDOT: PSS) electrodes on a Polyethylenterephthalat (PET) foil substrate were investigated and characterized. The use of PDOT: PSS on PET foil allows us to build flexible EWOD stacks which can be applied in the field of flexible electronics.
An application as a low-cost viscosity sensor, using one of the investigated stack designs is also presented. There we use the fluid dynamics of polar high-k fluids immersed in non-polar insulating fluids, which are excited by EWOD forces inside a tube with pressure compensation channels. The fluids are set in motion using the electrowetting effect resulting in a pressure difference inside the tube. From the time-dependent pressure response a correlation with the fluid?s dynamic viscosity is obtained.
Sprache der Kurzfassung:
Englisch
Englischer Vortragstitel:
Low-Cost Fabrication of Electrowetting-on-Dielectric Structures for Microelectronics and Lab-on-a-Chip Applications
Forschungs-