Günther Bauer, Z. Kovats, Michael Mühlberger, Till Hartmut Metzger, J. Peisl, Friedrich Schäffler, Julian Stangl, Y. Zhuang,
"Investigation of ß-SiC precipitation in Si1-yCy epilayers by x-ray scattering at grazing incidence"
, in Applied Physics Letters, 2000, Z. Kovats, T.H. Metzger, J. Peisl, J. Stangl, M. Mühlberger, Y. Zhuang, F. Schäffler, G. Bauer: Investigation of ß-SiC precipitation in Si1-yCy epilayers by x-ray scattering at grazing incidence, Appl. Phys. Lett. 76, 3409-3411 (2000).
Original Titel:
Investigation of ß-SiC precipitation in Si1-yCy epilayers by x-ray scattering at grazing incidence
Sprache des Titels:
Englisch
Journal:
Applied Physics Letters
Erscheinungsjahr:
2000
Notiz zum Zitat:
Z. Kovats, T.H. Metzger, J. Peisl, J. Stangl, M. Mühlberger, Y. Zhuang, F. Schäffler, G. Bauer: Investigation of ß-SiC precipitation in Si1-yCy epilayers by x-ray scattering at grazing incidence, Appl. Phys. Lett. 76, 3409-3411 (2000).
Forschungs-