,
"Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon"
, 1996, G. Hobler, A. Simionescu, L. Palmetshofer, F. Jahnel, R.v. Criegern, C. Tian, G. Stingeder: Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon; J. Vac. Sci. Technol. B 14, 272 (1996)
Original Titel:
Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon
Sprache des Titels:
Englisch
Englischer Titel:
Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon
Erscheinungsjahr:
1996
Notiz zum Zitat:
G. Hobler, A. Simionescu, L. Palmetshofer, F. Jahnel, R.v. Criegern, C. Tian, G. Stingeder: Verification of Models for the Simulation of Boron Implantation into Crystalline Silicon; J. Vac. Sci. Technol. B 14, 272 (1996)
Publikationstyp:
Aufsatz / Paper in sonstiger referierter Fachzeitschrift