An Inkjet Printed ZNO Based Gas Sensor on a Flexible High Temperature Substrate for NO2 Sensing
Sprache des Titels:
Englisch
Original Buchtitel:
Proceedings Transducers 2019
Original Kurzfassung:
In this work we demonstrate the realization of a simple
and low cost NO2 gas sensor on a flexible polymer
substrate. The sensor was fabricated using inkjet printing
and hydrothermal growth and consists of a printed
interdigital structure on which a sensitive zinc oxide layer
was grown. The chosen growing process does not require
an additional seed layer, which allows to directly grow the
zinc oxide layer on the substrate. Furthermore, the
operating temperature was intrinsically achieved with an
inkjet printed heater, which is located at the backside of
the sensor.