Evanescent-Wave Gas Sensing Using an Integrated Thermal Light Source
Sprache des Titels:
Englisch
Original Buchtitel:
Proceedings Eurosensors 2017
Original Kurzfassung:
The last years showed an increased request for miniaturised, CMOS-compatible gas
detectors. In contrast to sensors utilizing metal-oxide chemical interfaces, optical strategies are
potentially faster and more robust. Recently we demonstrated CO2 detection by evanescent-wave
absorption in the mid-infrared using a combination of an external laser source and silicon
waveguides based on CMOS technology. We now go one step further and demonstrate the
feasibility of detection of CO2 down to a concentration of 3% with a low-cost integrated thermal
source. These results are promising for further technological developments towards on-chip
mid-infrared photonic gas sensors, and new designs are currently devised to increase the yet
relatively low sensitivity.