Günther Bauer, A. A. Darhuber, C.M. Sotomayor Torres, P.D. Wang,
"Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping"
, in Journal of Applied Physics, 1998, ISSN: 0021-8979, A.A. Darhuber, G.Bauer, P.D. Wang, C.M. Sotomayor Torres: "Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping", J. Appl. Physics 83, 126-131 (1998), ISSN-Number 0021-8979
Original Titel:
Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping
Sprache des Titels:
Englisch
Journal:
Journal of Applied Physics
Erscheinungsjahr:
1998
Notiz zum Zitat:
A.A. Darhuber, G.Bauer, P.D. Wang, C.M. Sotomayor Torres: "Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping", J. Appl. Physics 83, 126-131 (1998), ISSN-Number 0021-8979
ISSN:
0021-8979
Publikationstyp:
Aufsatz / Paper in sonstiger referierter Fachzeitschrift
Forschungs-