"On the origin and the calculation of the force in electrostatic actuators"
, in Institute of Physics Publishing, in European Journal of Physics, Vol. 37, Seite(n) 045207, 2016
On the origin and the calculation of the force in electrostatic actuators
Sprache des Titels:
This paper reviews fundamental ways to calculate the forces between charged
electrodes as they appear, e.g., in electrostatic drives. In particular the consideration of the force acting on the surface charge layers on the electrodes, the principle of virtual displacement, and the Maxwell stress tensor are considered for two examples: a parallel plate capacitor and an electrostatic comb drive featuring interdigitated electrodes.