Bernhard Jakoby,
"On the origin and the calculation of the force in electrostatic actuators"
, in European Journal of Physics, Vol. 37, Institute of Physics Publishing, Seite(n) 045207, 2016, ISSN: 0143-0807
Original Titel:
On the origin and the calculation of the force in electrostatic actuators
Sprache des Titels:
Englisch
Original Kurzfassung:
This paper reviews fundamental ways to calculate the forces between charged
electrodes as they appear, e.g., in electrostatic drives. In particular the consideration of the force acting on the surface charge layers on the electrodes, the principle of virtual displacement, and the Maxwell stress tensor are considered for two examples: a parallel plate capacitor and an electrostatic comb drive featuring interdigitated electrodes.