We present a multilayer dielectrophoresis (DEP) chip for programmable trapping of single cells and obtaining electrical impedance spectroscopy (IS) data for the trapped cells. Our aim is to characterize the heterogeneity of tumor cells using impedance spectra. The final goal is the realization of an automated system for isolating tumor cells from blood samples, trapping cells, and measuring each single cell in a wide frequency band. In this contribution we introduce the design, describe the fabrication technology, and present simulations. In contrast to previous work of other workgroups, we address all traps individually and use an optimized electrode geometry. Additionally, an efficient fabrication process is applied.