Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator
Sprache des Titels:
Proceedings of the Microelectronic Systems Symposium 2014
In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.