Characterization and Calibration of U-Shaped Mass Density and Viscosity Sensors by an Analytical Modeling Approach
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The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
This contribution is about resonant viscosity and mass density sensors based on oscillating U-shaped structures which are operated at their fundamental resonance frequencies. The actuation and read-out for both types of sensors are based on Lorentz forces. The measuring principle, the device setups, complete analytical models relating the (known) input to the (measured) output signals as well as first measurements obtained with the discussed devices are presented.