Stefan Schaur, Bernhard Jakoby,
"An efficient modeling approach for the capacitance of interdigitating electrodes"
, in Ch. Grimm, B. Jakoby, P. Reichel, E. Schoitsch, K. Unterrainer: Informationstagung Mikroelektronik 12, Serie Informationstagung Mikroelektronik, Vol. 12, Seite(n) 99, 4-2012, ISBN: 978-3-85133-071-7
Original Titel:
An efficient modeling approach for the capacitance of interdigitating electrodes
Sprache des Titels:
Englisch
Original Buchtitel:
Informationstagung Mikroelektronik 12
Original Kurzfassung:
Interdigitating electrodes present a feasible method to realize capacitive sensing structures. Finding an analytical expression for the capacitance of a multi-layered geometry, however, proves difficult. We present a semi-numerical method based on the modelling of the charge distribution on the electrodes in order to obtain an approximation for the capacitance. The method is then applied to analyze the sensitivity of different wiring schemes, when the capacitance is used to detect changes in permittivity of different material layers.
Forschungs-