Stefan Schaur, Bernhard Jakoby,
"An Efficient Method for Modeling Planar Interdigitated Electrodes for Capacitive Sensing"
: 2011 IEEE Sensors Proceedings, IEEE, 445 Hoes Lane Piscataway, NJ 08855-1331 USA, Seite(n) 1970-1973, 2011, ISBN: 978-1-4244-9288-6
An Efficient Method for Modeling Planar Interdigitated Electrodes for Capacitive Sensing
Sprache des Titels:
2011 IEEE Sensors Proceedings
Interdigitated electrodes represent a commonly used planar structure when it comes to implementing capacitive
sensors. The calculation of the created electric fields, however, is very complicated as soon as cover layers are involved. We present a simple semi-analytical approach, which yields approximate expressions for the capacitance between the electrodes. The method can be easily adapted to geometries with multiple cover layers. As an example, the sensitivity of the capacitance to changes in the permittivity for alternate wiring schemes of electrodes is discussed.