Thomas Lederer, Martin Heinisch, Wolfgang Hilber, Bernhard Jakoby,
"Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke"
, in Int. Microelectronics and Packaging Society, in Journal of Microelectronics and Electronic Packaging, Vol. 6, Nummer 4, Seite(n) 205-210, 2009, ISSN: 1551-4897
Original Titel:
Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke
Sprache des Titels:
Englisch
Journal:
Journal of Microelectronics and Electronic Packaging