Stacked Fishnet and Swiss cross samples fabricated by NIL
Sprache des Titels:
Proc. Metamaterials 2010
In this paper we show the fabrication of stacked Fishnet and Swiss cross samples using Nanoimprint
Lithography (NIL) and their optical properties. Few approaches have been done to achieve 3D negative
index materials (NIM), which will be an important step towards the application in practical devices. Those reported fabrication techniques are often restricted to small area and/or consist of different and often complicated process steps. The stacking method we will present using NIL is a very fast technique to achieve 3D materials. First single layers of Negative Index Material (NIM) structures are fabricated on Si substrate and afterwards the single layers are peeled off by using a UV-curable hybrid polymer as ?glue?. Continuing this process several times on top of each other leads to stacked NIM layers. The stacking process can be performed onto quartz, borofloat or also flexible substrates taking only few minutes. This process works for Split Ring Resonators (SRR) as well as for double gold layer structures like Fishnet and Swiss cross.