Frieder Lucklum, Bernhard Jakoby,
"Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase Sensing"
, in IEEE, in IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 57, Nummer 5, Seite(n) 1000-1002, 5-2010, ISSN: 0885-3010
Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase Sensing
Sprache des Titels:
Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of non-contact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.
Sprache der Kurzfassung:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control