Johann Mayrwöger, Wolfgang Reichl, Christian Krutzler, Bernhard Jakoby,
"CO2 Measurement with an easy designed Bolometer"
: Tagungsband zur Informationstagung Mikroelektronik 10, Serie OVE Schriftenreihe, Nummer 56, Österreichischer Verlag für Elektrotechnik, Eschenbachgasse 9, 1010 Wien, Seite(n) 131-134, 2010, ISBN: 978-3-85133-055-7
CO2 Measurement with an easy designed Bolometer
Sprache des Titels:
Tagungsband zur Informationstagung Mikroelektronik 10
We report on the design of a simple germanium bolometer designed as a Fabry-Perot absorbing structure, which can be used for monitoring, e.g., CO2, where no additional filter is required. CO2 is absorbs IR radiation in a major band centered around 4.26µm. The selectivity of the whole sensor-configuration is mainly accomplished by the wavelength-response associated with the Fabry-Perot structure involved. The analysis shows, that the designed bolometer has an adequate response-function for the measurement of CO2 concentration. Combining this analysis for the bolometer with ray tracing simulations for a connected sample chamber yields the response for an entire IR-absorption sensor system, which is in good agreement with measurements.