Thomas Lederer, Wolfgang Hilber, Bernhard Jakoby,
"Electromagnetic membrane-pump with an integrated magnetic yoke"
: Eighth IEEE Conference on SENSORS, Seite(n) 532-536, 10-2009, ISBN: 978-1-4244-5335-1
Original Titel:
Electromagnetic membrane-pump with an integrated magnetic yoke
Sprache des Titels:
Englisch
Original Buchtitel:
Eighth IEEE Conference on SENSORS
Original Kurzfassung:
Micro fluidics is a fast developing research area and
is of interest to many scientific groups. Within microfluidic
systems micro pumps transport the fluid to different functional
areas of a so called Lab-on-a-chip. Up to now electromagnetically
actuated microfluidic pumps make no use of an
essential part of electromagnetic systems: A highly permeable
core which leads the magnetic flux and lowers the magnetic
resistance. Utilizing the magnetic force which tends to minimize
the reluctance of a magnetic system a magnetic actuator was
achieved. Another common principle for directing laminar fluid
flows, nozzle and diffuser geometries, was simulated and the
optimal geometry for different Reynolds numbers was
evaluated. The combination of these two improvements allows
for a bubble resistive magnetic-reluctance micro-pump with an
integrated membrane-like magnetic yoke, which was modeled,
fabricated utilizing a simple single layer thin film technology,
and tested. The realized device features high pumping forces to
actuate viscous fluids, high pumping frequencies (565Hz and
multiples thereof) for a continuous flow and low power
consumption. In our contribution we discuss the device design,the underlying theory and first experimental results.