Helmut Sitter, G.J. Glanner, M.A. Herman,
"Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry"
, in Vacuum, Vol. 46, Nummer 1, Seite(n) 69-76, 1995, H. Sitter, G.J.Glanner, M.A. Herman:Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry, Vacuum 46, 69 (1995)
Original Titel:
Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry
Sprache des Titels:
Englisch
Journal:
Vacuum
Volume:
46
Number:
1
Seitenreferenz:
69-76
Erscheinungsjahr:
1995
Notiz zum Zitat:
H. Sitter, G.J.Glanner, M.A. Herman:Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry, Vacuum 46, 69 (1995)