,
"Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry"
, 1995, H. Sitter, G.J.Glanner, M.A. Herman:Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry, Vacuum 46, 69 (1995)
Original Titel:
Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry
Sprache des Titels:
Englisch
Englischer Titel:
Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry
Erscheinungsjahr:
1995
Notiz zum Zitat:
H. Sitter, G.J.Glanner, M.A. Herman:Exact Determination of the Real Substrate Temperature and Film Thickness in Vacuum Epitaxial Growth Systems by Visible Laser Interferometry, Vacuum 46, 69 (1995)
Publikationstyp:
Aufsatz / Paper in sonstiger referierter Fachzeitschrift