,
"Effect of Ge-related Mechanical Strain on Defect and Impurity Behaviour in Ion-implanted Silicon"
, 1995, Yu. Suprun-Belevich, L. Palmetshofer:Effect of Ge-related Mechanical Strain on Defect and Impurity Behaviour in Ion-implanted Silicon, Nucl. Instr. Methods B 106, 262 (1995)
Original Titel:
Effect of Ge-related Mechanical Strain on Defect and Impurity Behaviour in Ion-implanted Silicon
Sprache des Titels:
Englisch
Englischer Titel:
Effect of Ge-related Mechanical Strain on Defect and Impurity Behaviour in Ion-implanted Silicon
Erscheinungsjahr:
1995
Notiz zum Zitat:
Yu. Suprun-Belevich, L. Palmetshofer:Effect of Ge-related Mechanical Strain on Defect and Impurity Behaviour in Ion-implanted Silicon, Nucl. Instr. Methods B 106, 262 (1995)
Publikationstyp:
Aufsatz / Paper in sonstiger referierter Fachzeitschrift