Leopold Palmetshofer, Y. Suprun-Belevich, Margarita V. Stepikhova,
"Donor Activity of Ion-implanted Erbium in Silicon"
, in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and, Vol. 127-128, Seite(n) 479-482, 5-1997, L. Palmetshofer, Yu. Suprun-Belevich, M. Stepikhova:Donor Activity of Ion-implanted Erbium in Silicon, Nucl. Instr. Meth. B 127/128, 479 (1997)
Original Titel:
Donor Activity of Ion-implanted Erbium in Silicon
Sprache des Titels:
Englisch
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and
Volume:
127-128
Seitenreferenz:
479-482
Erscheinungsmonat:
5
Erscheinungsjahr:
1997
Notiz zum Zitat:
L. Palmetshofer, Yu. Suprun-Belevich, M. Stepikhova:Donor Activity of Ion-implanted Erbium in Silicon, Nucl. Instr. Meth. B 127/128, 479 (1997)