Measurement of Liquid Properties Using a Vibrating Micromachined Clamped-Clamped Beam Structure
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Proc. SENSOR Conference, Nürnberg, May 2007
In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquid’s influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout.