Jochen Kuntner, Franz Kohl, Bernhard Jakoby,
"Simultaneous thermal conductivity and diffusivity sensing in liquids using a micromachined device"
, in Sensors and Actuators A, Vol. 130-131, Elsevier, Seite(n) 62-67, 2006
Simultaneous thermal conductivity and diffusivity sensing in liquids using a micromachined device
Sprache des Titels:
Due to unique features like small thermal masses and reduced conductivities, membrane-based micromachined thermal sensors offer features
superior to those provided by comparable macroscopic measurement setups. In this contribution a micromachined device is applied to characterize
the thermal transport properties of various liquids. By means of sinusoidal excitation of a heater structure placed on a membrane and recording the
resulting temperature at a specified distance using integrated germanium thermistors, the liquid’s thermal parameters can be determined. A simple
two-dimensional (2D) analytical model allows to interpret the amplitude and the phase of the measured sinusoidal temperature variation yielding
both, the thermal conductivity and the diffusivity of the liquid.