Kurt Hingerl, Alberta Bonanni, David Stifter, Alberto Montaigne Ramil, Helmut Sitter, Klaus Schmidegg,
"Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides"
, in Journal of Vacuum Science and Technology B, Vol. B21(4), Seite(n) 1825, 2003, ISSN: 1520-8567
Original Titel:
Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metal-organic chemical vapor deposition grown ternary nitrides