Uncertainties of a Linear Variable Differential Inductor Probe for Picometer Resolution Measurement Systems
Sprache des Vortragstitels:
Englisch
Original Tagungtitel:
Sensor + Test 2011
Sprache des Tagungstitel:
Deutsch
Original Kurzfassung:
Linear Variable Differential Inductor (LVDI) probes are used for most precise roundness
and roughness measurements down to sub?nanometer. Even under rough conditions the LVDI guarantees
a good repeatability of the measurement. In this paper some widely overlooked sources of errors that?if
unavoidable?increase measurement uncertainty beyond the theoretical limit attainable are discussed and
the magnitude of their influence is detailed. Usually safely ignored influences like stochastic noise, heating
and elastic deformation can result in uncertainties of several nanometers.