Resume : Rayleigh and Abbe derived formula for the diffraction limit, which is due to the finite width of each imaging system, because the optical near fields cannot be transmitted through it. The intensity overlaps on the screen and it cannot be any more unambiguously decided if the image stems from one or from two distinct points or areas. With the appearance of spectroscopic imaging ellipsometers (SIE) especially applied to structured samples, and capable of imaging the ellipsometric angles or Mueller Matrix elements the problem above cannot be solved in direct way, i.e. the angular resolution cannot be changed.
Sprache der Kurzfassung:
Can Ellisometry beat the Diffraction Limit?
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