Multi-faceted SiGe/Si(001) cupola islands with ultra-steep side facets up to 68° formed via Stranski-Krastanow growth
Sprache des Vortragstitels:
Englisch
Original Tagungtitel:
XIVth International Biannual Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST 2011), Loipersdorf (Fürstenfeld), Austria, September 25-30, 2011