Johannes Heitz, Martin Kührer, Cristina Plamadeala, Gerda Buchberger,
"Nano-scale photonic ripples, dots, grids, and heterostructures on polymeric substrates produced by UV laser processing"
, in 24nd International Conference on Transparent Optical Networks (ICTON), Bari, Italy, 2024, 10647606, 7-2024
Original Titel:
Nano-scale photonic ripples, dots, grids, and heterostructures on polymeric substrates produced by UV laser processing
Sprache des Titels:
Englisch
Original Kurzfassung:
Periodic nano-structures can be produced on poly(ethylene terephthalate) (PET) foils using a KrF* excimer-laser
with a wavelength of 248 nm and a pulse duration of about 20 ns. In this contribution, we show that nano-ripples,
or so-called laser-induced periodic surface structures (LIPSS), as well as nano-dots can be fabricated in a
reproducible way. Especially the latter ones have not been systematically investigated up to now. The periodicity
of the ripples can be varied by the angle of incidence of the laser beam. For pattern formation, various irradiation
parameters (pulse number, pulse energy, and polarization) were varied systematically, allowing the fabrication of
interesting grids and hybrid patterns of ripples superimposed with dots. All nano-structures are characterized by
scanning electron microscopy and relevant morphological parameters, such as periodicity, are assessed. In the case
of the epoxy-photoresist SU-8, KrF* laser processing can be employed along standard ultraviolet (UV) lithography
to create hierarchical structures, that is, a nano-ripple pattern superimposed onto ?m-scale lines.
Keywords: photonic micro- and nano-structures, laser-induced periodic surface structures (LIPSS), UV laser
processing, photoresists, UV lithography.
Sprache der Kurzfassung:
Englisch
Journal:
24nd International Conference on Transparent Optical Networks (ICTON), Bari, Italy, 2024, 10647606
Forschungs-