H. Scherr, Robert Weigel,
"Micromechanical Precision Pressure Sensor Incorporating SAW Delay Line"
, 6-1999, R. Weigel, H. Scherr, "Micromechanical Precision Pressure Sensor Incorporating SAW Delay Line", Proceedings of the ASME Mechanics and Materials Conference '99, Blacksburg, USA, Juni 1999.
Original Titel:
Micromechanical Precision Pressure Sensor Incorporating SAW Delay Line
Sprache des Titels:
Englisch
Erscheinungsmonat:
6
Erscheinungsjahr:
1999
Notiz zum Zitat:
R. Weigel, H. Scherr, "Micromechanical Precision Pressure Sensor Incorporating SAW Delay Line", Proceedings of the ASME Mechanics and Materials Conference '99, Blacksburg, USA, Juni 1999.