Thomas Plach, Kurt Hingerl, David Stifter, V. Dragoi, Markus Wimplinger,
"Investigations on Bond Strength Development of Plasma Activated Direct Wafer Bonding with Annealing Plasma Activation"
, in ECS Transactions - Electrochemical Society, Vol. 50, Seite(n) 277-285, 2013, ISSN: 1938-5862
Original Titel:
Investigations on Bond Strength Development of Plasma Activated Direct Wafer Bonding with Annealing Plasma Activation
Forschungs-