Pablo Alonso, Javier Martin Sanchez,
"Fabrication of Semiconductor Quantum Dot Molecules: Droplet Epitaxy and Local Oxidation Nanolithography Techniques"
, in Jiang Wu, Zhiming M. Wang: Quantum dot molecules, Serie Lecture Notes in Nanoscale Science and Technology, Vol. 14, Seite(n) 1-29, 2014, ISBN: 978-1-4614-8130-0
Fabrication of Semiconductor Quantum Dot Molecules: Droplet Epitaxy and Local Oxidation Nanolithography Techniques
Sprache des Titels:
Quantum dot molecules
A semiconductor quantum dot molecule (QDM) composed of two interacting quantum dots (QDs) is the simplest coupled system formed by semiconductor quantum nanostructures. Potentially, a QDM is the ideal building block for the realization of a quantum computation device. However, the fabrication of QDMs is far from being a straightforward task, particularly if a precise control of QDs density, size, or spatial location is required. Recently, an important improvement in the control of these properties has been achieved by using patterned semiconductor substrates followed by preferential epitaxial growth. In this chapter we will overview two of such fabrication methods, which are based on: (1) in situ droplet epitaxy ?nanodrilling? and (2) ex situ local oxidation nanolithography.