Nikita Arnold, R. Kullmer, Dieter Bäuerle,
"Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach"
, in Microelectronic Engineering, Vol. 20, Seite(n) 31, 1993, ISSN: 1873-5568
Original Titel:
Simulation of Growth in Pyrolytic Laser-CVD of Microstructures - I. One-Dimensional Approach