Dieter Bäuerle, Michael Eyett, Ulrike Kolzer, R. Kullmer, Peter Mogyorosi, Klaus Piglmayer,
"Laser-Induced Surface Modification and Etching of Materials"
, in D.J. Ehrlich, G.S. Higashi, M.M. Oprysko: Laser- and Particle-Beam Chemical Processing for Microelectronics, Serie Materials Research Society, Seite(n) 411, 1988
Original Titel:
Laser-Induced Surface Modification and Etching of Materials
Sprache des Titels:
Englisch
Original Buchtitel:
Laser- and Particle-Beam Chemical Processing for Microelectronics