R. Kullmer, Dieter Bäuerle,
"Laser-Induced Chemical Etching of Silicon in Chlorine Atmosphere: I. Pulsed-Irradiation"
, in Applied Physics A, Vol. 43, Seite(n) 227-232, 1987
Original Titel:
Laser-Induced Chemical Etching of Silicon in Chlorine Atmosphere: I. Pulsed-Irradiation