3D materials made of gold using Nanoimprint Lithography
Sprache des Titels:
Englisch
Original Kurzfassung:
In this work we show large area 3D stacking of gold structures like
Split Ring Resonators (SRRs) and fishnet structures using Nanoimprint
Lithography (NIL).
Two main fabrication processes are used to stack multiple layers of
such structures on top of each other: For the stacked fishnet
structures a finished double-layer of gold structures is covered with a
spacer layer which is planarized using chemical mechanical polishing so
that a second layer can be processed on top. For the SRR structures a
transfer printing process is used. Here the gold structures are
transferred from one substrate onto another substrate. Especially this
process is a new and unique possibility to stack gold patterns by
transferring gold structures several time on the same substrate and
therefore to build up 3D materials in a fast and cost efficient way.
(C) 2009 Elsevier B.V. All rights reserved.
Sprache der Kurzfassung:
Englisch
Journal:
Microelectronic Engineering
Veröffentlicher:
ELSEVIER SCIENCE BV
Volume:
87
Number:
5-8
Seitenreferenz:
1008-1010
Erscheinungsjahr:
2010
ISSN:
1873-5568
Anzahl der Seiten:
3
Notiz zur Publikation:
35th International Conference on Micro-and Nano-Engineering, Ghent,
BELGIUM, SEP 28-OCT 01, 2009
Forschungs-