Growth of multioxide planar film with the nanoscale inner structure via anodizing Al/Ta layers on Si
Sprache des Titels:
An Al/Ta bilayer specimen prepared by a successive sputter-deposition of a 150-nm tantalum layer and a 180-nm aluminium layer onto a silicon wafer is anodically processed in a sequence of steps in oxalic acid electrolytes, at voltages of up to 53 V, which generates a 260-nm alumina film with well-ordered nanoporous structure. Further potentiodynamic reanodizing the specimen to 220 V causes the simultaneous growth of a 65-nm tantalum oxide layer beneath the alumina film and an array of oxide 'nanocolumns' (~50 mn wide, ~80 nm apart, ~7 × 10^9 cm-2 population density) penetrating the alumina pores and reaching precisely to the top of the alumina film. The complete filling of the alumina pores is assisted by the high Pilling-Bedworth ratio for Ta/Ta2O5 and a substantially increased transport number for tantalum species (0.4), which is an average value of all migrating tantalum ions with different oxidation states. The nanocolumns are shown to be composed of a unique, regular mixture of Ta2O5 (dominating amount), suboxides TaO2 and TaOx (0.5 < x < 1), Al2O3, metallic Ta and Al aggregates, tantalum diboride (TaB2) and oxidized boron from the electrolyte. The ionic transport processes determining the self-organized growth of these planar oxide nanostructures are considered and described conceptually.