Theoretical simulation und preparation of binary and ternary combinatorial libraries by thermal PVD
Sprache des Titels:
Englisch
Original Kurzfassung:
Binary and ternary composition spread material libraries were prepared using a thermal physical vapor deposition system with three separated heating sources and adjustable chamber geometry. In this work, we present binary Cu84-20Al16-80 and Zn71-8Mg29-92 libraries as well as a ternary Cu67-6Ag81-13Mg66-12 system with a thickness around 300 nm. The composition of the obtained films was determined by automated energy dispersive X-ray spectroscopy and the data further used to develop a mathematical model to simulate the surface. The thickness of a copper film was measured by atomic force microscopy and used to verify the theoretical model, whereas topography scans provided information on the surface roughness. The consistency between theoretical simulations and observed compositions concludes multiple source thermal co-evaporation to be a reliable method with high variety regarding source metals and deposition rates and therefore of high value for material library fabrication.
Sprache der Kurzfassung:
Englisch
Englische Kurzfassung:
Binary and ternary composition spread material libraries were prepared using a thermal physical vapor deposition system with three separated heating sources and adjustable chamber geometry. In this work, we present binary Cu84-20Al16-80 and Zn71-8Mg29-92 libraries as well as a ternary Cu67-6Ag81-13Mg66-12 system with a thickness around 300 nm. The composition of the obtained films was determined by automated energy dispersive X-ray spectroscopy and the data further used to develop a mathematical model to simulate the surface. The thickness of a copper film was measured by atomic force microscopy and used to verify the theoretical model, whereas topography scans provided information on the surface roughness. The consistency between theoretical simulations and observed compositions concludes multiple source thermal co-evaporation to be a reliable method with high variety regarding source metals and deposition rates and therefore of high value for material library fabrication.
Journal:
Physica Status Solidi A: Applications and Materials Science
Volume:
207
Seitenreferenz:
801-806
Erscheinungsjahr:
2010
ISSN:
1862-6300
Anzahl der Seiten:
6
Notiz zur Publikation:
1)Max-Planck-Institut für Eisenforschung GmbH, Max-Planck-Str.1, 40237 Düsseldorf, Germany
2)School of Chemistry, The University of Edinburgh, Edinburgh, EH9 3JJ Scotland, UK
3)Dortmunder OberflächenCentrum, Eberhardstr.12, 44145 Dortmund, Germany
4)Institute for Chemical Technology of Inorganic Materials, Johannes Kepler University, Linz, Austria / 1Sebastian Oliver Klemm, 1,2Alistair Graeme Martin, 1Julia Lengsfeld, 3Janine-Christina Schauer, 3Bernd Schuhmacher, 1,4Achim Walter Hassel
Forschungs-