Bernd Arminger, Bernhard Zagar,
"Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer"
: Scanning Microscopy 2009, 2009
Original Titel:
Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer
Sprache des Titels:
Englisch
Original Buchtitel:
Scanning Microscopy 2009
Original Kurzfassung:
In our proposed paper we present a technique for characterising the piezo–driven sensor head of a scanning
probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some
experimental results are described. Furthermore a mechanical model for the sensor head is introduced and
verified by the experimental results. Also guidance for an online or offline correction of the sensors position is
presented.