Klaus Schmidegg, Martin Bergsmann, Michael Hohage, Lidong Sun, Peter Zeppenfeld,
"In-line monitoring of ultra-thin metallic films on PET substrates with sub-nm resolution"
: 50th Annual Technical Conference Proceedings, Serie Proceedings of the annual technical conference, Socitey of Vacuum Coaters, Seite(n) 677-680, 2007, ISBN: 0737-5921, ISSN: 0737-5921
Original Titel:
In-line monitoring of ultra-thin metallic films on PET substrates with sub-nm resolution
Forschungs-