,
"Simultaneous doping of Silicon layers with Erbium and Oxygen in the course of molecular beam epitaxy"
, 2001, V.G. Shengurov, S.P. Svetlov, V.Yu. Chalkov, G.A. Maksimov, Z.F. Krasil'nik, B.A. Andreev, M.V. Stepikhova, D.V. Shengurov, L. Palmetshofer, H. Ellmer: Simultaneous doping of Silicon layers with Erbium and Oxygen in the course of molecular beam epitaxy Semicond. 35, 918 (2001)
Original Titel:
Simultaneous doping of Silicon layers with Erbium and Oxygen in the course of molecular beam epitaxy
Sprache des Titels:
Englisch
Englischer Titel:
Simultaneous doping of Silicon layers with Erbium and Oxygen in the course of molecular beam epitaxy
Erscheinungsjahr:
2001
Notiz zum Zitat:
V.G. Shengurov, S.P. Svetlov, V.Yu. Chalkov, G.A. Maksimov, Z.F. Krasil'nik, B.A. Andreev, M.V. Stepikhova, D.V. Shengurov, L. Palmetshofer, H. Ellmer: Simultaneous doping of Silicon layers with Erbium and Oxygen in the course of molecular beam epitaxy Semicond. 35, 918 (2001)
Publikationstyp:
Aufsatz / Paper in sonstiger referierter Fachzeitschrift