Title:Fabrication of integrated poly-silicon wave guides for mid-infrared absorption spectroscopy using the evanescent fieldAuthor(s):Gerald Stocker,  Cristina Consani,  Pooja Thakkar,  Andreas Tortschanoff,  Clement Fleury,  Gerald Pühringer,  Reyhaneh Jannesari,  Parviz Saeidi,  Thomas Grille,  Christoph Kovatsch,  Ulf Bartl,  Elmar Aschauer,  Bernhard JakobyBooktitle:MikroSystemTechnik Congress 2021Editor(s):VDEPage Reference:3 page(s)Publishing:2/2022

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