Title:Fabrication of integrated poly-silicon wave guides for mid-infrared absorption spectroscopy using the evanescent fieldAuthor(s):Gerald Stocker, Cristina Consani, Pooja Thakkar, Andreas Tortschanoff, Clement Fleury, Gerald Pühringer, Reyhaneh Jannesari, Parviz Saeidi, Thomas Grille, Christoph Kovatsch, Ulf Bartl, Elmar Aschauer, Bernhard JakobyBooktitle:MikroSystemTechnik Congress 2021Editor(s):VDEPage Reference:3 page(s)Publishing:2/2022