Title:Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensingAuthor(s):Gerald Stocker, Cristina Consani, Pooja Thakkar, Clement Fleury, Andreas Tortschanoff, Khaoula-Farah Ourak, Gerald Pühringer, Reyhaneh Jannesari, Parviz Saeidi, Elmar Aschauer, Ulf Bartl, Christoph Kovatsch, Thomas Grille, Bernhard JakobyJournal:Journal of Sensors and Sensor SystemsISSN:2194-8771Page Reference:page 225-231, 7 page(s)Publishing:8/2022Volume:11Number:2