Title:Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensingAuthor(s):Gerald Stocker,  Cristina Consani,  Pooja Thakkar,  Clement Fleury,  Andreas Tortschanoff,  Khaoula-Farah Ourak,  Gerald Pühringer,  Reyhaneh Jannesari,  Parviz Saeidi,  Elmar Aschauer,  Ulf Bartl,  Christoph Kovatsch,  Thomas Grille,  Bernhard JakobyJournal:Journal of Sensors and Sensor SystemsISSN:2194-8771Page Reference:page 225-231, 7 page(s)Publishing:8/2022Volume:11Number:2

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