Title:Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing ApplicationsAuthor(s):Gerald Stocker,  Jasmin Spettel,  Thomas Grille,  Thomas Ostermann,  Reyhaneh Jannesari,  Bernhard JakobyBooktitle:Proc. 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2021Page Reference:page 1-4, 4 page(s)Publishing:2021

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