Title:Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing ApplicationsAuthor(s):Gerald Stocker, Jasmin Spettel, Thomas Grille, Thomas Ostermann, Reyhaneh Jannesari, Bernhard JakobyBooktitle:Proc. 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2021Page Reference:page 1-4, 4 page(s)Publishing:2021