Title:Towards Integrated Plasmonic Gas Sensors in the MWIRAuthor(s):Andreas Tortschanoff, Jasmin Spettel, Gerald Stocker, Thang Duy Dao, Cristina Consani, Clement Fleury, Florian Dubois, Thomas Grille, Thomas Ostermann, Parviz Saeidi, Reyhaneh Jannesari, Gerald Pühringer, Bernhard JakobyAbstract:Optical measurement approaches have proven to provide intrinsic selectivity and the sensitivity, required for the development of integrated gas sensors. In an ongoing project, we work towards a Si-photonics non-dispersive infrared gas sensor and are investigating the possibility of the incorporation of IR-plasmonic materials, which could allow an increase in sensitivities and reduce the size of such sensors. Here we present the basic concept and discuss in some detail first results concerning fabrication and characterization of the plasmonic properties.Booktitle:The 8th International Symposium on Sensor SciencePublisher:MDPIEditor(s):Engineering ProceedingsPage Reference:page 90, 4 page(s)Publishing:2021Series:Engineering ProceedingsVolume:6Number:1