Title:Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applicationsAuthor(s):Jasmin Spettel, Gerald Stocker, Thang Duy Dao, Reyhaneh Jannesari, Andreas Tortschanoff, Parviz Saeidi, Gerald Pühringer, Florian Dubois, Clement Fleury, Cristina Consani, Thomas Grille, Elmar Aschauer, Mohssen Moridi, Bernhard JakobyAbstract:We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.Booktitle:Journal of Physics Conference SeriesPublisher:IOP PublishingEditor(s):6th International Conference on Metamaterials and Nanophotonics METANANO 2021Page Reference:5 page(s)Publishing:2021Series:Journal of Physics: Conference SeriesVolume:2015Number:012149