Title:Aluminium, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic gratingsAuthor(s):Jasmin Spettel, Gerald Stocker, Thang Duy Dao, Reyhaneh Jannesari, Andreas Tortschanoff, Parviz Saeidi, Gerald Pühringer, Florian Dubois, Clement Fleury, Cristina Consani, Thomas Grille, Elmar Aschauer, Mohssen Moridi, Bernhard JakobyAbstract:We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.Journal:Optical Materials ExpressISSN:2159-3930Page Reference:page 1059-1069, 10 page(s)Publishing:2021Volume:11Number:4