Title:Numerical Investigations of Infrared Slot Waveguides for Gas SensingAuthor(s):Christian Ranacher, Andreas Tortschanoff, Cristina Consani, Reyhaneh Jannesari, Thomas Grille, Bernhard JakobyAbstract:Sensing of gases is a promising area for applications of photonic sensor devices that operate in the mid-infrared spectral range. We present a numerical investigation of slot waveguides for evanescent field sensing of CO2. The sensor platform is a poly-silicon slot waveguide on silicon dioxide, where both layers are deposited on a standard silicon substrate. The evanescent field ratio, which is a crucial parameter for the sensing performance of the waveguides, was determined and values as high as 42% were obtained.Booktitle:Proceedings Eurosensors 2018ISSN:2504-3900Page Reference:5 page(s)Publishing:2018Series:Proceedings (MDPI)Volume:2Number:13